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Jobs · Engineering · Massachusetts

Senior Systems Engineer, Advanced Automation & Robotics

Onto Innovation · Wilmington, MA · Yesterday
Engineering$115k–$173k/yrFull-time

Role Summary

FEO is creating a Common EFEM (Equipment Front-End Module) platform that can be used across multiple Onto tools. We are hiring a Senior Systems Engineer to lead system-level definition and integration of the EFEM platform.

Job Summary & Responsibilities

  • Define EFEM system requirements, functional specs, and interface definitions for use across multiple product families.
  • Develop system architecture, module boundaries, and integration plans for:
    • robotics and wafer handling
    • FOUP load ports and related sensors
    • motion and precision positioning
    • lighting and sensing subsystems
    • airflow / environmental controls
    • safety systems
    • control software
  • Set platform-level standards so the EFEM can be configured and reused without rework.
  • Lead integration across mechanical, electrical, software, robotics, and controls.
  • Work with SMEs across robotics, motion control, safety, PCBA design, optics, and software controls to resolve interface and behavior issues.
  • Define system-level metrics and acceptance criteria (throughput, placement accuracy, wafer flow reliability, environmental stability, contamination control).
  • Create and execute system-level test plans for modules and integrated builds.
  • Analyze data to find performance gaps (motion precision, handling reliability, vibration, thermal/environmental behavior, sensor performance).
  • Drive root cause analysis and coordinate corrective actions across teams.
  • Ensure compliance with relevant SEMI standards (e.g., E84, E87, E90, E10, S2, S8) and EFEM automation requirements.
  • Support interface specifications for AMHS, factory automation, and host control.
  • Produce documentation needed for adoption: architecture notes, interface specs, test methods, and performance requirements.
  • Collaborate with product teams, NPI, and FEO module owners to ensure the platform fits multiple tool architectures.
  • Present system behavior, trade-offs, risks, and design decisions to engineering and leadership.
  • Mentor engineers on integration discipline, validation practices, and systems thinking.

Qualifications

  • BS or MS in Systems Engineering, Mechanical Engineering, Electrical Engineering, Robotics, Mechatronics, or related field.
  • 8+ years in semiconductor capital equipment, robotics, mechatronics, precision automation, or other multidisciplinary systems.
  • Experience defining system architecture, interfaces, and requirements for complex systems.
  • Experience integrating robotics, precision motion, sensors, and controls into a working system.
  • Familiarity with SEMI standards and factory automation interfaces used with EFEMs.
  • Strong problem-solving skills using data, structured debugging, and clear written documentation.

Preferred

  • Direct EFEM development experience (wafer-handling robotics, load ports, automation).
  • Knowledge of contamination control, airflow management, environmental stability, and vibration mitigation.
  • Experience with reliability methods (FMEA, structured root cause analysis) and platform engineering.
  • Python, MATLAB, or similar tools for data analysis.

Why Join Onto Innovation?

At Onto Innovation, we believe your work should matter—and so should your well-being. That’s why we offer competitive salaries and a comprehensive benefits package designed to support you and your family. From health, dental, and vision coverage to life and disability insurance, PTO, and a 401(k) with employer match, we’ve got you covered. You’ll also enjoy access to our Employee Stock Purchase Program (ESPP), wellness initiatives, and cutting-edge tools—all within a collaborative, inclusive culture where your contributions are valued and recognized.

Career Path

Compensation & Growth
Base Salary Range: $115,200.00 - $172,800.00, offered in good faith and based on experience, location, and qualifications.
Additional Rewards: Annual bonus opportunities and potential long-term incentives tied to both company and individual success.

Important Note on Export Compliance

For certain positions requiring access to technical data, U.S. export licensing review may be necessary for applicants who are not U.S. Citizens, Permanent Residents, or other protected persons under 8 U.S.C. 1324b(a)(3).

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