Equipment Repair & Maintenance Technician

Key Responsibilities

• Monitor and maintain performance of lithography and vacuum-based processing equipment, including: Steppers, mask aligners, coat/develop tracks; Vacuum chambers and pumping systems (dry pumps, turbomolecular pumps, forelines); Rapidly diagnose and resolve equipment faults, alarms, vacuum leaks, and process deviations.
• Perform safe and efficient tool recoveries to return equipment to production.
• Maintain and troubleshoot high and ultra-high vacuum (HV/UHV) systems used in semiconductor processing.
• Diagnose issues related to: Vacuum integrity (leaks, pressure instability); Pump performance (mechanical, turbo, cryo where applicable); Valves, gauges, mass flow, and gas delivery systems.
• Perform pump swaps, rebuild coordination, and chamber conditioning as required.
• Support vacuum system calibration and ensure compliance with process specifications.
• Execute scheduled PMs on lithography and vacuum equipment to ensure reliability and precision.
• Perform corrective maintenance including: Component replacement (seals, O-rings, pumps, sensors); System calibration and alignment; Cleaning and rebuild activities for vacuum chambers.
• Update and improve maintenance procedures where applicable.

Production Support

• Sustain continuous production of photonic devices.
• Escalate complex equipment or vacuum-related issues with detailed documentation.
• Lithography & Process Support: Assist in controlling critical lithography parameters: Critical dimension (CD) uniformity, Overlay/alignment accuracy, Defectivity reduction; Ensure stable resist processing and exposure conditions within controlled vacuum/cleanroom environments where applicable.

Required Qualifications

• Associate degree or technical certification in Electronics, Mechanical Engineering Technology, Mechatronics, or related field (or equivalent experience).
• 2+ years of experience in semiconductor, photonics, or precision manufacturing.
• Hands-on troubleshooting experience with complex manufacturing equipment.
• Working knowledge of: Mechanical, electrical, pneumatic systems; Vacuum systems and gas handling fundamentals.
• Willingness to work a permanent night shift schedule (including weekends/holidays).

Preferred Qualifications

• Experience with lithography equipment (ASML, Canon, Nikon, SUSS, TEL tracks).
• Experience supporting vacuum-based semiconductor tools (e.g., deposition, etch, implant).
• Familiarity with high vacuum (HV/UHV) systems, leak detection techniques, and pump technologies.
• Exposure to III-V or photonics manufacturing (InP, GaAs, lasers, optical components).
• Basic data analysis skills (Excel, JMP).