Head of System Domain Architecture

ASML US brings together some of the brightest minds in science and engineering to develop cutting-edge e-beam inspection machines that enable the semiconductor industry to detect and analyze nanoscale defects, helping customers improve yield and accelerate the development of next-generation microchips.

About the role

As the Head of System Domain Architecture in San Jose, you define, own, and continuously evolve the system domain architecture across Business Lines, products, and technology generations. You lead the creation and execution of the System Domain Architecture roadmap across Module Delivery Units (MDUs), ensuring functional alignment and architectural consistency from strategy through delivery. In this role, you provide architectural leadership by shaping and preparing key architectural changes, resolving escalations with clear trade-offs, and safeguarding solution quality through coaching and review of domain architects’ work. You are the hierarchical leader of the System Domain Architect team for your domain, accountable for team composition, capability and resource planning, and the people management and development needed to meet domain and delivery demands.

Responsibilities

• Ensure end-to-end domain architectural coherence across relevant products and module generations, while driving the functional roadmap to deliver fit-for-purpose, cost-effective, and maintainable solutions.
• Deliver system-level domain-specific SEG documents and provide input for design rules.
• Create domain-specific PBS items and work with SE and D&I teams to optimize work breakdown.
• Coach domain technical skills on architectural practices.
• Define and maintain the Domain architecture across Business Lines, products, and generations.
• Develop and maintain the Domain Architecture roadmap and coordinate functional alignment across Module Delivery Units.
• Plan and prepare architectural changes and solutions based on the roadmap and business needs, within the Triple Constraint.
• Resolve escalations tied to architectural implications.
• Review the work of and coach System Domain Architects.
• Define and maintain the way of working for System Domain Architects, taking the needs of neighboring domains into account.
• Ensure that the Domain Architecture meets System Engineering requirements.
• Manage people development and performance of all System Domain architects (5-10 people), all direct reports.
• Support the technical development of domain architects and senior engineers within the domain, promoting knowledge sharing across teams and lifecycle phases.
• Mentor System Domain Architects.

Requirements

• BS in engineering or a relevant technical field. MSc or PhD preferred in a relevant technical field.
• Extensive experience (typically +15 years) in defining architecture within the relevant domain.
• Deep technical expertise and domain knowledge.
• Recognized senior expert with strong relationships across ASML, trusted broadly on technical and managerial levels.
• Customer-focused with the ability to formulate a vision on future developments and apply emerging knowledge in a complex domain.
• Able to drive alignment among architects and designers.
• Able to build broad trusting relationships for effective negotiation of critical product aspects.
• Strong communicator, enabling clear articulation of complex technical guidance across diverse stakeholder groups.
• Ability to support System Domain Architects and drive a technical topic to an ASML/Customer optimal outcome.
• Experience in leadership.
• E-beam inspection or related experience is preferred.

Skills

• Technical & Functional Skills:
  • Domain Architecture Roadmap Ownership: Owns and governs the domain architecture roadmap across MDUs and product generations, aligning architecture with the functional roadmap to ensure integrity, commonality, extensibility, and long-term maintainability.
  • Architectural Decision & Escalation Leadership: Leads architecture decisions under scope–time–cost trade-offs, proactively resolving escalations and conflicting demands by clarifying options, communicating risks, and driving stakeholder alignment to a fit-for-purpose outcome.
  • Capability & Resource Strategy: Defines domain architecture capability and resourcing strategy, shaping team composition and development priorities to deliver domain technology objectives, sustain execution across lifecycle phases, and build long-term architectural strength.
• Leadership Skills: Knowledge of all HMI domains and strong people management skills.
• Behavioral & Leadership Skills:
  • Ensures Accountability: Creates a clear accountability system where ownership, expectations, and decision rights are explicit; drives consistent follow-through on commitments across teams; and addresses performance or delivery gaps constructively.
  • Demonstrates Self-awareness: Understands and manages one’s own strengths, limitations, emotions, and impact on others; actively seeks and uses feedback to adapt behaviors and decisions.
  • Customer Focus: Anticipates and deeply understands customer needs, translates insights into strategy, and mobilizes teams to deliver differentiated value while making trade-offs based on customer impact.
  • Values Differences: Intentionally seeks, respects, and integrates diverse perspectives and working styles to strengthen collaboration and decision quality.
  • Builds Effective Teams: Forms, aligns, and develops teams that consistently deliver results by establishing clear goals, roles, and ways of working; fosters trust and inclusion; and coaches individuals to grow performance and capability.

Other

• This position is located on-site in San Jose, CA, and requires onsite presence to attend in-person work-related events, trainings, and meetings. A flexible workplace arrangement allows for remote work up to two days a week.
• Routinely required to sit; walk; talk; hear; use hands to keyboard, finger, handle, and feel; stoop, kneel, crouch, twist, reach, and stretch.
• Occasionally required to move around the campus and lift and/or move up to 20 pounds.
• May require domestic and/or international travel dependent on business needs.
• Specific vision abilities required include close vision, color vision, peripheral vision, depth perception, and the ability to adjust focus.

Pay

The current base annual salary range for this role is $237,000–$355,500. Pay scales are determined by role, level, location, and alignment with market data. Individual pay is determined through interviews and an assessment of job-related skills, relevant education and experience, certifications, abilities, and pay relative to other team members.

Benefits

• Medical, dental, vision, and basic life insurance.
• 401k plan participation.
• Eight (8) hours of vacation leave every month and thirteen (13) paid holidays throughout the calendar year.