Vacuum System Engineer

About the Role

ASML is seeking a Vacuum Systems Engineer to join the Defectivity Module Delivery Unit (MDU) in Wilton, Connecticut. Within ASML, the Development and Engineering (D&E) sector specifies and designs ASML products throughout their lifecycle. The Defectivity MDU department ensures critical environment cleanliness, including molecular and particle cleanliness, within vacuum reticle modules of cutting-edge Extreme Ultraviolet (EUV) lithography machines. As a Vacuum Systems Engineer, you will enable next-generation EUV lithography by creating contamination-free vacuum environments for advanced semiconductor manufacturing systems. You will model and design gas flow from atmosphere to deep vacuum, select materials, and design cleanliness processes supporting vacuum-grade performance in scanner and test-rig environments. Your solutions will directly impact wafer yield, machine availability, and customer productivity.

Scope and impact vary by job grade:

• JG08: Leads technically complex vacuum and gas-flow work packages, supports hardware projects and lead designers, owns subsystem deliverables, and drives cross-functional alignment with architects, projects, competences, customer support, and research partners. Focuses on subsystem-level solutions while developing broader architecture expertise.
• JG09: Takes full technical ownership of complex vacuum systems or gas-flow architectures, manages system impacts and cross-functional dependencies, resolves technical uncertainty, and contributes standards and evidence-based recommendations across ASML. Identifies and mitigates risks impacting customer performance and reliability. Serves as a subject matter expert influencing vacuum and gas-flow strategy across projects, products, and sites.

Responsibilities

• Work closely with Veldhoven machine conditioning architects, Defectivity MDU architects, and leadership to specify vacuum systems and gas flows in scanners and test rigs.
• Partner with hardware project teams and lead designers to integrate vacuum and gas-flow requirements throughout the product development lifecycle.
• Lead the ASML Wilton Engineer guild for machine conditioning architecture and vacuum systems competence onsite.
• Translate system design into gas-flow and vacuum architecture meeting system requirements.
• Specify vacuum system components, standards, and procedures, ensuring proper documentation in Technical Product Documentation (TPD).
• Define, model, and execute qualification tests to verify architecture or subsystem performance against requirements.
• Support resolution of particle contamination issues through analysis and specification of flushing and venting procedures.
• Specify pump-down and vent procedures ensuring consistent flow performance.
• Participate in design reviews for test rigs and support functional integration of architectures or subsystems.
• Execute design of experiments for degassing chambers and components at product and process levels.
• Provide surface particulate and vacuum-grade cleanliness support, troubleshoot escalations, and contribute practical recommendations from analysis.
• Transfer vacuum systems knowledge between ASML units and interact with D&E Delivery Teams, functions, competences, customer support, and research.
• Perform analyses and calculations to predict flow architecture or subsystem functionality, including pressure-drop budgeting, flow budgeting, humidification, and gas purity.
• Take direction from ASML System Architects and principal engineering mentors on critical large-capital-equipment development efforts.
• Follow EHS policies and proactively identify, communicate, and mitigate safety risks.

Requirements

• Minimum education and experience vary by job grade:
  • JG08: BS degree in a relevant technical field and 5+ years of experience; MS or PhD preferred. Advanced degrees may compensate for years of experience.
  • JG09: BS degree in a relevant technical field and 9+ years of substantial experience; MS or PhD preferred. Advanced degrees may compensate for years of experience.
• Solid theoretical and practical experience with vacuum and gas-flow phenomena and applications, preferably in the semiconductor industry.
• Priority given to internal candidates familiar with Twinscan and vacuum systems ADT, hands-on architecture knowledge, or ASML vacuum system flow modeling.

Skills

Technical and Functional Skills

• Vacuum systems and gas-flow architecture: Specify vacuum systems, gas flows, pump-down and vent procedures, and architecture requirements for scanner and test-rig environments.
• Cleanliness, materials, and contamination control: Knowledge of molecular and particle cleanliness, surface particulate behavior, vacuum-grade cleanliness, materials compatibility, desorption issues, and contamination troubleshooting.
• Analysis, modeling, and testing: Plan and execute tests and DOEs, analyze measurement results, perform pressure-drop and flow budgeting, and use evidence to make practical recommendations.
• Documentation and technical communication: Document standards, procedures, requirements, test evidence, and component specifications in Technical Product Documentation and present findings to varied technical audiences.
• Preferred technical skills: Experience with particle transport in flows, rarefied gas flow, plasma physics, electrostatics, surface science, RGA or other vacuum measurement techniques, and calculations or simulations for gas-flow and particle transport.
• Modeling or simulation tools: Experience predicting gas flow, vacuum performance, contamination transport, or thermal-fluid behavior is highly desirable.
• Strong technical writing and communication skills.

Behavioral and Leadership Skills

• Drives results: Translates technical goals into clear priorities and delivers committed outcomes with quality and ownership.
• Collaborates and communicates effectively: Works across disciplines, suppliers, and stakeholders to align expectations, resolve issues, and transfer knowledge between ASML units.
• Demonstrates self-awareness: Seeks and applies feedback, adapts approach, and improves collaboration in complex or ambiguous environments.
• Values differences: Respects and integrates diverse perspectives to strengthen decision quality and inclusive execution.
• Builds effective teams: Establishes clear goals, roles, accountability, and ways of working while coaching others as applicable.
• Drives vision and purpose: Connects technical direction to business priorities and helps teams stay focused through ambiguity and change.
• Ownership and adaptability: Demonstrates high energy, self-motivation, quick learning, flexibility, and the ability to handle multiple projects and tasks concurrently with minimal guidance.

Why Join ASML?

• Work on technology enabling the world’s leading semiconductor manufacturers.
• Solve highly complex multidisciplinary engineering challenges.
• Collaborate with globally recognized experts in vacuum technology, contamination control, and lithography.
• Influence future EUV and High-NA technology platforms.
• Grow through technical leadership, mentoring, and cross-site collaboration opportunities.

Schedule

• This is a full-time, regular role based on-site in Wilton, Connecticut.
• On-site presence required for in-person work-related events, trainings, and meetings to support teamwork, collaboration, and innovation.
• A flexible workplace arrangement may be available for roles conducive to remote work, up to 2 days a week.
• Some travel, up to 10%, within the US and internationally may be expected depending on business needs.

Additional Responsibilities

• Routinely required to sit, walk, talk, hear, use hands to keyboard, handle and feel, stoop, kneel, crouch, twist, reach, and stretch.
• Occasionally required to move around campus and lift or move up to 20 pounds.
• Potential exposure to strong magnetic fields, high voltage, and currents.
• This position requires access to controlled technology as defined in the United States Export Administration Regulations (15 C.F.R. 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work.