Sr. Process Engineer, Chemical Mechanical Planarization, Terafab

Tesla · Austin, TX · 2 mo ago

On-siteEngineeringFull-time

Develop and qualify CMP processes for metal layers, dielectrics and barrier films
Optimize removal rates, within-wafer uniformity, planarization efficiency, and surface finish through systematic DOE and first-principles analysis of pad, slurry, and conditioning interactions
Own post-CMP clean process qualification including brush scrub and chemical clean steps
Qualify CMP tools from installation through production readiness, including pad conditioning, slurry delivery, and endpoint detection
Analyze processes from a first-principles, physics-based approach to understand and manipulate mechanisms, not just recipes
Lead root cause analysis, establish inline metrology and SPC control strategies, and drive systematic yield improvement
Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues
Drive next-generation CMP slurry formulations and process development

Degree in Chemical Engineering, Materials Science, Electrical Engineering, Mechanical Engineering, or related technical field, or equivalent experience
5+ years of hands-on CMP process engineering experience in a semiconductor fab, especially
Deep experience with CMP tool qualification (Applied Materials, Ebara, or equivalent), slurry and pad optimization, and process of record (POR) establishment at advanced nodes
Proficiency with CMP metrology tools: film thickness measurement, defect inspection, surface roughness measurement (AFM), and dishing/erosion characterization
Strong DOE skills and statistical analysis capability (JMP, Python, or R)
Ability to work closely and proactively across lithography, etch, thin films, integration, and equipment engineering teams

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