EUV Lithography Process Development Engineer- TPG

About the role

As a Lithography pathfinding process development engineer at Micron Technology in Boise, Idaho, you will evaluate advanced lithography including Extreme Ultra Violet (EUV) and High Numerical Aperture (High NA) EUV on next-generation memory parts. You will collaborate with our team to understand roadmap requirements for next-generation memory and how new technologies intercept our roadmap. You will partner with technology development and manufacturing to ensure they will be ready to implement EUV and other new patterning approaches. This role may require travel to support high NA EUV work.

Responsibilities

• Lead and participate in pathfinding activities for new patterning technology, including all lithography nodes such as 193nm immersion, EUV, and high NA EUV.
• Develop EUV modules in our technology development (TD) site, including setting up lithography processes and working with other process areas and process integration to meet manufacturing requirements.
• Travel up to once a month to New York or other locations to support early learning for high NA EUV.
• Work closely with defect inspection teams and our mask shop to develop appropriate inspection strategies for EUV masks.
• Collaborate with manufacturing sites to align on equipment and materials requirements, and ensure EUV processes are aligned for transfer.

Requirements

• Understanding of EUV lithography, including differences between EUV lithography and deep ultraviolet (DUV) lithography.
• Knowledge and understanding of 193nm immersion multiple patterning processes, such as litho-etch-litho-etch (LELE) and self-aligned quadruple patterning (SAQP).
• Knowledge of optics for photolithography or experience with photolithography simulation software such as Prolith or S-Litho.

Qualifications

• M.S. or Ph.D. in Engineering, Chemistry, Physics, or a study relevant to Photolithography plus at least 3 years of semiconductor industry experience; or
• B.S. in Engineering, Chemistry, or Physics with 10+ years of semiconductor industry process-related experience with emphasis on Photolithography.

Preferred Qualifications

• Hands-on industry experience with High NA EUV in a pathfinding setting.
• Coursework or proven experience showing strong statistical analysis skills, including design of experiments and data analysis. Experience with JMP, Python, or other statistical analysis software is helpful.
• Strong written and verbal communication skills. Ability to write and present clear and concise executive summaries for Micron and supplier management teams.

Benefits

Micron benefits are designed to help you stay well, provide peace of mind, and help you prepare for the future. We offer:

• A choice of medical, dental, and vision plans enabling team members to select the plans that best meet their family healthcare needs and budget.
• Benefit programs that help protect your income if you are unable to work due to illness or injury, and paid family leave.
• A robust paid time-off program and paid holidays.

For additional information regarding the benefit programs available, please see the Benefits Guide posted on micron.com/careers/benefits.